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联系我们
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| 地 址：上海市 |
| 邮 编：201102 |
| 联系人：王國男 |
| 电 话：021-64196861 |
| 传 真：021-64193965 |
| 邮 箱：info@twinson.com.cn |
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公司名称：
上海兑爵商贸有限公司
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参考价格：
未标明
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发布时间：
2006-06-08
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| 产品描述： |
| 禁带的宽度、偏移和表面/界面电场。
Solstice是外延生长晶片生产线上在线检测的新型光折射检测仪,可以直接、快速测量晶片的禁带的宽度、偏移和表面/界面电场。 |
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Solstice外延晶片在线光折射检测仪的详细介绍
Spectrometer type: CCD Array
Spectral range of spectrometer:
Wavelength: 1100 nm to 280 nm
Photon Energy: 1.13 eV to 4.40 eV
IR detector option to extend to 1700 nm
Gratings available :A range of gratings will be
available for different
spectral ranges
Spectral Resolution:Depends on grating: 0.25-
1.00 nm resolution
Pump laser:
Uses pump laser on the OMIPROBE platform
Diode pumped solid state CW laser wavelength 532 nm power 150 mW
HeCd gas CW laser wavelength 325 nm power 50 mW
Pump beam spot size (angle of incidence 10O):\
Elliptical spot, semi-minor axis 0.1 mm, semi-major axis 0.1/sin10O. (pump beam size is reduced for PL measurements)
Acquisition time per spectrum:1 ms typical;
longer acquisition times can be set
Sample specification:Minimum 1 cm2 flat specular samples.
Wafer mapping stage(optional):
200 mm travel in x and y directions. 0.1 mm lateral resolution.
2”, 3”, 100 mm, 150 mm and 200 mm standard map recipes.
Customised wafer maps can also be programmed by the user.
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